Polyimide And Photoresist Ultrasonic Spraying Coating System With Micro Nozzle
Description:
The ultrasonic spraying system has been proven to be suitable for various applications that require uniform, repeatable photoresist or polyimide film coatings, and is a simple, economical, and reproducible photoresist and polyimide coating process.
Common applications of polyimide and photoresist ultrasonic coatings include but are not limited to MEMS, lenses, microfluidic devices, microelectronics, and filters. Coating systems are capable of coating flat and 3D substrates, typically including silicon chips, glass, ceramics, and metals.
Parameters:
| Product Type | Laboratory desktop FS620 | Pilot type vertical FS650 | Online production type FS680 | FS1005 | | Spray nozzle operating frequency | 20-200KHz | 100KHz (120KHz或150KHz for select) | | Nozzle power | 10-100W | 2~ 10W | | Continuous spraying volume max | 20-1200ml/h/pcs,Scalable | 0.01-l/min | | Effective spraying width | 2-260mm/pcs,Scalable | 1-5mm | | Spray uniformity | <5% | <5% | | Solution conversion rate | ≥95% | ≥95% | | Dry film thickness | 20nm-100μm | 20nm-1μm | | Solution viscosity | ≤50cps | ≤10cps | | temperature range | 1-60℃ | 1-60℃ | | Atomized particles (median value) | 10-45μm (Distilled water), determined by the frequency of the nozzle | 10-25μm(Distilled water), determined by the frequency of the nozzle | | Diversion pressure max | ≤0.15MPA | ≤0.05MPa | | input voltage | 220V±10%/50-60Hz | 220V±10%/50-60Hz | |
Structure and principle of ultrasonic nozzle:
Ultrasonic nozzle is a tuning device based on specific frequency resonance. Their maximum length and diameter are inversely proportional to the resonance frequency, with a frequency range between 25 and 120 kHz; That is to say, the higher the ultrasonic frequency, the smaller the transducer, and the medium droplet size generated by nozzle atomization will also decrease.
The ultrasonic nozzle consists of several parts. The driving component includes a pair of piezoelectric transducers that convert electrical energy into mechanical motion. The high-frequency power supply comes from a separate generator that can lock onto the resonance frequency of the nozzle. The transducer is located between two titanium cylinders, which amplify the vibration motion of the transducer to maximize its effect on the atomization surface. We chose titanium as the material because it has high tensile strength, good acoustic properties, and excellent corrosion resistance.
The liquid is transported to the atomization surface through a large-diameter channel along the entire length of the nozzle. Once the liquid reaches the atomization surface, it will encounter high amplitude vibrations that break it into small droplets that move at low speeds (less than 3 inches/second). To achieve this effect, the power of the application must be kept within a relatively narrow window. Too low power will cause the nozzle to stop working, i.e. atomization will not occur; If the power is too high, the liquid will be torn into large pieces, which is not suitable for atomizing spray. Usually, the operating power of the nozzle varies between 1 and 15 watts depending on the specific design and properties of the sprayed liquid.
Polyimide And Photoresist Ultrasonic Spraying Coating System With Micro Nozzle
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